Junya Matsushita

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:30 PM - 5:00 PM B1 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[16p-B1-1~13] 13.8 Compound and power electron devices and process technology

2:00 PM - 2:15 PM

△ [16p-B1-3] Fabrication and Electric Characteristics Evaluation of GaN-MIS Capacitor with BN

〇Junya Matsushita¹, Kentarou Nagamatsu², Xu Yang¹, Atushi Tanaka², Maki Kushimto¹, Manato Deki², Shugo Nitta², Yoshio Honda², Hiroshi Amano^2,3,4 (1.Nagoya Univ., 2.IMaSS, 3.Akasaki Research Center, 4.VBL)

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