Yusuke Kumazaki

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:30 PM - 5:00 PM B1 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[16p-B1-1~13] 13.8 Compound and power electron devices and process technology

3:45 PM - 4:00 PM

△ [16p-B1-9] Study on photo-electrochemical response property of AlGaN/GaN hetero-structure and its application to low damage etching technology

〇Yusuke Kumazaki¹, Keisuke Uemura¹, Taketomo Sato¹ (1.RCIQE, Hokkaido Univ.)