Masaki Yamamoto

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:15 PM - 4:45 PM B7 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.3 deposition of thin film and surface treatment

[16p-B7-1~13] 8.3 deposition of thin film and surface treatment

2:00 PM - 2:15 PM

[16p-B7-4] SiO₂ Film Deposition by O₂/TEOS Slot Type Microwave Plasma CVD

〇Masaki Yamamoto¹, Haruka Suzuki¹, Hirotaka Toyoda^1,2 (1.Nagoya Univ., 2.PLANT, Nagoya Univ.)