kimitaka keya

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:15 PM - 4:45 PM B7 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.3 deposition of thin film and surface treatment

[16p-B7-1~13] 8.3 deposition of thin film and surface treatment

2:15 PM - 2:30 PM

△ [16p-B7-5] Influence of interfaces on Si-H₂/Si-H bond ratio of inrrinsic a-Si:H on p-layer

〇(M2)kimitaka keya¹, Kazuma Tanaka¹, Takashi Kojima¹, Susumu Toko¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Nao Itagaki¹, Kazunori Koga¹, Masaharu Shiratani¹ (1.Kyushu Univ.)