masaharu shimabayashi

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:15 PM - 4:45 PM B7 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.3 deposition of thin film and surface treatment

[16p-B7-1~13] 8.3 deposition of thin film and surface treatment

3:00 PM - 3:15 PM

△ [16p-B7-8] Temperature dependence of surface nitriding characteristics of SiC by the irradiation of a remote nitrogen plasma

〇masaharu shimabayashi¹, kazuaki kurihara², koichi sasaki¹ (1.Hokkaido Univ., 2.IMEC/Toshiba)