Iimin Rei

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:45 PM - 4:15 PM C302 (Nikko Houou)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[16p-C302-1~9] 15.6 Group IV Compound Semiconductors (SiC)

4:00 PM - 4:15 PM

[16p-C302-9] Electrical characteristics of SiC-MOS capacitor with La-silicate/ALD-SiO₂ stacked gate dielectrics

〇Iimin Rei¹, Hitoshi Wakabayashi¹, Kataoka Yoshinori², Hiroshi Iwai², Kuniyuki Kakushima¹, Masayuki Furuhashi³, Shingo Tomohisa³, Satoshi Yamakawa³ (1.Tokyo Tech. School of Eng., 2.Tokyo Tech. IIR, 3.Mitsubishi Electric Corp.)