The 77th JSAP Autumn Meeting, 2016

Yoshihiko Hirai

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Chairperson, etc.

Tue. Sep 13, 2016 9:00 AM - 12:15 PM D61 (Bandaijima Bldg.)

  • Oral presentation
  • | 7 Beam Technology and Nanofabrication
  • | 7.3 Micro/Nano patterning and fabrication

[13a-D61-1~12] 7.3 Micro/Nano patterning and fabrication

Toshiyuki Horiuchi(Tokyo Denki Univ.), Yoshihiko Hirai(Osaka Pref. Univ.), Jun Taniguchi(Tokyo Univ. of Sci.), Hiroaki Oizumi(GIGAPHOTON)