Toshiyuki Horiuchi(Tokyo Denki Univ.), Yoshihiko Hirai(Osaka Pref. Univ.), Jun Taniguchi(Tokyo Univ. of Sci.), Hiroaki Oizumi(GIGAPHOTON)
Toshiyuki Horiuchi
Chairperson, etc.
Tue. Sep 13, 2016 9:00 AM - 12:15 PM D61 (Bandaijima Bldg.)
- Oral presentation
- | 7 Beam Technology and Nanofabrication
- | 7.3 Micro/Nano patterning and fabrication