The 77th JSAP Autumn Meeting, 2016

Tatsuya Okada

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Chairperson, etc.

Thu. Sep 15, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Wenchang Yeh(Shimane Univ.), Tatsuya Okada(Univ. of the Ryukyus)