Wenchang Yeh(Shimane Univ.), Tatsuya Okada(Univ. of the Ryukyus)
Wenchang Yeh
Chairperson, etc.
Thu. Sep 15, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology