[13a-A23-1~7] 6.1 Ferroelectric thin films

▲ [13a-A23-5] Compositional dependence of BaTiO₃-xBaSnO₃ piezoelectric thin films prepared by combinatorial sputtering

Hongbo Cheng^1,2, 〇Takuya Teramoto¹, Hirotaka Hida¹, Isaku Kanno¹, Jun Ouyang² (1.Kobe Univ., 2.Shandong Univ.)

Keywords:piezoelectric, thin film, MEMS

Investigation of lead-free piezoelectric thin films has been of great importance to realize environmental-friendly piezoelectric MEMS. One of the promising lead-free piezoelectric materials is (1−x)BaTiO₃–xBaSnO₃ (BT-xBS) solid solution whose piezoelectric coefficient (d₃₃) is as high as 425 pC/N. In this study, we tried to deposit BT-xBS thin films on Si substrates and examine the compositional dependence of piezoelectric properties.