The 77th JSAP Autumn Meeting, 2016

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Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[13a-A31-1~11] 6.3 Oxide electronics

Tue. Sep 13, 2016 9:00 AM - 11:45 AM A31 (302A)

Takayoshi Katase(Hokkaido Univ.)

9:30 AM - 9:45 AM

[13a-A31-3] Characterization of VO2 film domains by helium ion microscope (HIM) at controlled temperatures and voltage

〇Shinichi Ogawa1, Tomohiko Iijima1, Teruo Kanki2, Hidekazu Tanaka2 (1.AIST, 2.Osaka Univ.)

Keywords:helium ion microscopy, voltage contrast, vanadium oxide

Characterization of VO2 film domains by helium ion microscope (HIM) at controlled temperatures and voltage