[13a-B7-1~11] 8.2 Plasma measurements and diagnostics

[13a-B7-3] Laser absorption spectroscopy for measurement of He metastable atoms of a microhollow cathode plasma

〇(D)keisuke ueno¹, Kenta Kamebuchi¹, Jiro Kakutani¹, Leo Matsuoka², Shinichi Namba², Keisuke Fujii¹, Taiichi Shikama¹, Masahiro Hasuo¹ (1.Kyoto Univ., 2.Hiroshima Univ.)

Keywords:laser absorption spectroscopy, atmospheric pressure plasma

We developed a microhollow cathode discharge device, which can generate and sustain plasma at atmospheric pressure. It has cathode, insulator and anode which have a hole of diameter 0.3 mm, and plasma is generated in the hole. The feed gas is helium. In our presentation, we are going to show experimental results of a measurement of He metastable atoms conducted by laser absorption spectroscopy with the wavelength of the laser of 1083 nm.