[13a-C31-1~8] 3.7 Laser processing

[13a-C31-6] Detection of Trace Substance Adhered on Surface by LIBS

Yoshizo Kawaguchi¹, Hideki Ohmura¹, 〇Tadatake Sato¹ (1.AIST)

Keywords:Laser-induced Breakdown Spectroscopy, Laser Ablation, Surface Elemental Analysis

An applicability of laser-induced breakdown spectroscopy (LIBS) to the inspection of trace substances on the surfaces of aluminum alloy was examined. As such substance, we have employed silicone oil, which are often used as parting agents. For versatility and improvement of sensitivity for surface substance, laser light in UV wavelength was employed. For the samples with surface concentration 1~35 μg/cm², relative increase in intensity of Si emission peaked at 288 nm was confirmed. On the basis of surface concentration dependence, limit of detection was evaluated.