12:00 PM - 12:15 PM
[13a-D61-12] The characteristics of repeated transfer durability in the UV-NIL using a release agent-free replica mold
Keywords:nanoimprint, replica mold, release agent
The repetition transfer characteristics of Ultraviolet nanoimprint lithography was examined using release coating free replica mold. This replica molds was made of UV curable resin which includes release coating material. Thus, this replica mold can use to transfer for UV-NIL without release coating. The repetition transfer characteristics were measured by contact angle and error rate. As a results, the fabricated replica mold can transfer up to 1200 times.