[13p-A26-1~16] 6.2 Carbon-based thin films

[13p-A26-1] Fabrication of NV center array for quantum sensing by low-energy ion implantation with nano-hole resist mask

〇Itaru HIGASHIMATA¹, Takuma Okada¹, Risa Kagami¹, Tokuyuki Teraji², Shinobu Onoda³, Moriyoshi Haruyama^3,5, Keisuke Yamada³, Masafumi Inaba¹, Hayate Yamano¹, Priyadharshini Balasubramanian⁴, Liam P McGuinness⁴, Boris Naydenov⁴, Fedor Jelezko⁴, Takeshi Ohshima³, Takahiro Shinada⁶, Hiroshi Kawarada¹, Wataru Kada⁵, Osamu Hanaizumi⁵, Junichi Isoya⁷, Takashi Tanii¹ (1.Waseda Univ., 2.NIMS, 3.QST, 4.Ulm Univ., 5.Gunma Univ., 6.Tohoku Univ., 7.Univ. of Tsukuba)

Keywords:Nitrogen Vacancy