[13p-A26-1~16] 6.2 Carbon-based thin films

[13p-A26-2] Fabrication of nitrogen-vacancy center array using nano-hole resist mask II

〇Takuma Okada¹, Itaru Higashimata¹, Risa Kagami¹, Tokuyuki Teraji², Shinobu Onoda³, Keisuke Yamada³, Moriyoshi Haruyama^3,5, Masahumi Inaba¹, Hayate Yamano¹, Priyadharshini Balasubramanian⁴, Boris Naydenov⁴, Liam McGuinness⁴, Fedor Jelezko⁴, Takeshi Ohshima³, Takahiro Shinada⁶, Hiroshi Kawarada¹, Wataru Kada⁵, Osamu Hanaizumi⁵, Junichi Isoya⁷, Takashi Tanii¹ (1.Waseda Univ., 2.NIMS, 3.QST, 4.Ulm Univ., 5.Gunma Univ., 6.Tohoku univ., 7.Univ. of Tsukuba)

Keywords:NV center, diamond