4:30 PM - 5:00 PM
[13p-B8-7] Characterization of point defects by means of positron annihilation
- Si, nitrides, metals, and insulators -
Keywords:vacancy, positron annihilation
Positron annihilation is a powerful technique for evaluating vacancy-type defects in materials. It can provide information about defect spices, densities, and depth distributions. We report studies of vacancy-type defects in grinded Si, ion-implanted GaN, electroplated Cu, and porous materials.