The 77th JSAP Autumn Meeting, 2016

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Oral presentation

7 Beam Technology and Nanofabrication » 7.1 X-ray technologies

[13p-C31-1~11] 7.1 X-ray technologies

Tue. Sep 13, 2016 1:45 PM - 5:00 PM C31 (Nikko Kujaku AB)

Takeshi Higashiguchi(Utsunomiya Univ.), Atsushi Sunahara(Inst. for Laser Tech.)

4:30 PM - 4:45 PM

[13p-C31-10] Fabrication of the SnO2 bubble target for laser produced plasma source

〇Shuntaro Shoji1,2, Christopher Musgrave2, Keiji Nagai1,2 (1.Tokyo Tech., 2.Tokyo Tech., Chem. Lif. Sci.)

Keywords:EUV, plasma, material