[13p-D62-1~14] 6.4 Thin films and New materials

[13p-D62-3] Fabrication and Characterization of a Transparent Cu Grid Electrode Using a Screen Mesh as a Template

〇HIDEO TOKUHISA¹, SHIHO TSUKAMOTO¹, SATOKO MORITA¹, NAOKI SHIRAKAWA¹ (1.AIST FLEC)

Keywords:copper electrode, transparent electrode, screen

In this study, we have fabricated a transparent copper grid electrode as a low cost alternative to ITO electrode. It was made by etching a sputtered copper on a flexible plastic film through a mask pattern, which was prepared by a screen template method instead of the current photolithography techniques. We will report the method and characterization of the grid electrode.