[13p-P4-1~4] 7.5 Ion beams

[13p-P4-4] Fabrication of oblique pillar structure with ClF₃ neutral cluster beam

〇Toshio Seki¹, Tadashi Syojo², Kunihiko Koike², Hiroki Yamamoto³, Takahiro Kozawa³, Takaaki Aoki¹, Jiro Matsuo¹ (1.Kyoto Univ., 2.Iwatani Corp., 3.ISIR Osaka Univ.)

Keywords:cluster, neutral beam, etching