[13p-P5-1~64] 17 Nanocarbon Technology（Poster）

[13p-P5-21] Graphene-like films formed by Plasma CVD with infrared LED irradiation

〇Akira Nemoto¹, Kazuma Saitou¹, Shigeru Yamauchi², Takao Komiyama¹, Yasunori Chonan¹, Hiroyuki Yamaguchi¹, Takashi Aoyama¹ (1.Akita Pref. Univ., 2.Akita Pref. Univ. inst.)

Keywords:graphene, Plasma CVD

About the graphene films formed by the plasma CVD (PCVD) method, RF plasma, microwave plasma, and the ultraviolet irradiation method have been already considered, but improvement of the quality of films is a big problem. Until now, we have examined improvement of the quality of films in PCVD by irradiating infrared LED of wavelength 3.4μm to evoke the expansion and contraction vibration of the CH₄ molecules which are raw materials. This time, an effect of the plasma output reduction by the infrared LED irradiation was confirmed.