[13p-P7-1~17] 6.4 Thin films and New materials

[13p-P7-1] A study on the preparation of tantalum-and tungsten-doped vanadium oxide films
as a detector material for infrared sensors

Taiki Arai¹, Kazuhiro Saito¹, Ryosuke Watanabe¹, 〇Yoji Saito¹ (1.Seikei University)

Keywords:bolometer, phase transformation, vanadium oxide

Electrical properties of W- and Ta-doped VO₂ films were investigated.