[13p-P7-1~17] 6.4 Thin films and New materials

[13p-P7-2] Preparation of niobium- and tungsten-doped vanadium oxide films for bolometer infrared sensors

Rei Kitano¹, Takuya Kato¹, Ryosuke Watanabe¹, 〇Yoji Saito¹ (1.Seikei University)

Keywords:bolometer, phase transformation, vanadium oxide

We tried to prepare Nb- and W-doped vanadium oxide films for infrared sensors. We investigated their electrical properties.