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[13p-P8-19] Fabrication of magnetic tunnel junctions constituted by Heusler alloys Co2-x(Fe0.4Mn0.6)1+xSi
Keywords:magnetic tunnel junction, Heusler alloy, tunnel magneto resistance
For the realization of high tunnel magnetoresistance (TMR) effect in ferromagnetic tunnel junction (MTJ) element, half-metal Heusler alloys are attracting most attention these days. Recently, with the intent to improve the half-metallicity of the Heusler alloy, high TMR ratio has been achieved by using a non-stoichiometric composition Co2(FeαMnβ)Si0.84. However, details such as the mechanism are not revealed. This study aimed to perform the verification. We prepared thin films and MTJs with Co2-x(Fe0.4Mn0.6)1+xSi, and evaluated crystallinity and surface-flatness. Further, TMR ratio of the MTJ element fabricated under optimum conditions, was up to 224 % at room temperature.