[13p-P9-1~38] 12.5 Organic solar cells

[13p-P9-38] Flexible Environmental Barriers by CVD for Organic Devices

〇Yutaro Tachibana¹, Tomoyuki Yokota¹, Wakako Yukita¹, Mari Koizumi¹, Takao Someya¹ (1.The University of Tokyo)

Keywords:barrier film

We have developed a flexible high barrier film consisting of multiple layers of SiON and Parylene. The barrier film is made out of 3 layers of SiON and 2 layers of parylene formed one on another. Each layer has a thickness of 200 nm for SiON and 1 μm for parylene giving us total thickness of less than 3 μm. Even with this ultrathin structure, the water vapor transmission rate and the oxygen transfer rate were, respectively, 5.0×10^-4 g/m² and 0.1cc/m² per day. The structural durability of these multiple layers was demonstrated by applying this film on a pre-stretched flexible substrate. These results show the developed flexible high barrier film can improve air stability of an organic device without interference of the device’s mechanical flexibility.