The 77th JSAP Autumn Meeting, 2016

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[14a-A26-1~10] 6.2 Carbon-based thin films

Wed. Sep 14, 2016 9:00 AM - 11:45 AM A26 (203-204)

Hiroki Akasaka(Titech)

9:00 AM - 9:15 AM

△ [14a-A26-1] Fabrication and Analysis of DLC Films by Filtered Pulse Arc Deposition

〇Ryo Isono1, Toru Harigai1, Yushi Iijima1, Takahiro Imai1, Masafumi Yamano1, Yoshiyuki Suda1, Hirofumi Takikawa1, Hitoe Habuchi2 (1.Toyohashi Univ. Technol., 2.Gifu Natl. Coll. Technol.)

Keywords:DLC, Thin films, Arc discharge