Thickening of Self-Standing Super DLC Film Using a Water-Soluble Polymer Sacrificial Layer

masafumi yamano; Toru Harigai; Takahiro Imai; Yoshiyuki Suda; Hirofumi Takikawa; Masao Kamiya; Makoto Taki; Yushi Hasegawa; Nobuhiro Tsuji; Mamiko Nishiuchi; Hironao Sakaki; Kiminori Kondo

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[14a-A26-1~10] 6.2 Carbon-based thin films

Wed. Sep 14, 2016 9:00 AM - 11:45 AM A26 (203-204)

Hiroki Akasaka(Titech)

9:15 AM - 9:30 AM

△ [14a-A26-2] Thickening of Self-Standing Super DLC Film Using a Water-Soluble Polymer Sacrificial Layer

〇masafumi yamano¹, Toru Harigai¹, Takahiro Imai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Nobuhiro Tsuji³, Mamiko Nishiuchi⁴, Hironao Sakaki⁴, Kiminori Kondo⁴ (1.Toyohashi Univ., 2.Itoh Opt. Ind., 3.Onward Ceram. Coat., 4.JAEA)

Keywords:Diamond-like Carbon, Sacrificial Layer