[14a-A26-1~10] 6.2 Carbon-based thin films

[14a-A26-8] Comparison of diamond-like carbon films prepared by plasma based ion implantation and arc ion plating

〇Setsuo Nakao¹, Yasusei Yamada¹, Hideki Moriguchi² (1.AIST, 2.Nippon ITF)

Keywords:diamond-like carbon, plasma based ion implantation, arc ion plating

Structural changes of diamond-like carbon (DLC) films prepared by plasma based ion implantation have been investigated as a function of preparation conditions. In this time, the microstructure and mechanical properties of the films are compared with those of DLC films prepared by arc ion plating.