[14a-B13-1~10] 13.5 Semiconductor devices and related technologies

[14a-B13-5] Charge pumping EDMR method towards single interface defect analysis

〇Masahiro Hori¹, Ryoichi Narimatsu², Toshiaki Tsuchiya³, Yukinori Ono¹ (1.Shizuoka Univ., 2.Univ. of Toyama, 3.Shimane Univ.)

Keywords:charge pumping, interface defect, EDMR