2:15 PM - 2:45 PM
[14p-A21-4] N-polar Growth of Nitride Semiconductors
Keywords:Nitride semiconductor, polarity
It has passed 20 years since blue LEDs consisting of nitride semiconductors have been commercially available. The crystalline quality as the threading dislocation density including laser diodes for H-DVDs is 105~6/cm2 is still poor. This value is by two or three order magnitude higher than that of InGaAsP for optical communications systems. For the electronic device application coming up, the improvement in the crystalline quality has to hurry up. The technology for In-rich InGaAlN also has to be developed. In light of the current situation, the current status and possibility of n-polar growth are introduced.