[14p-A23-1~9] Classification and designation on carbon based films as diamond-like carbon (DLC) films -Advanced measurement technology to support the standardization, and industrial application aimed at the world market-

[14p-A23-2] Structure and Classification of DLC films

〇Naoto Ohtake¹ (1.Tokyo Tech)

Keywords:DIamond-like carbon, Standardization, Classification

Carbon-based films are widely used in industry. Among the carbon–based
films, DLC films have been the subject of considerable attention because
of their exceptional mechanical properties such as low friction
coefficient and high wear resistance; however, no designation has been
proceeded not only from scientific but also industrial point of view.
This report represents classification of DLC films in terms of sp³ ratio and hydrogen content. Non-doped DLC was classified into TYPE I (ta-C), TYPE II (ta-C:H), TYPE III a-C), and TYPE IV (a-C:H).