[14p-A23-1~9] Classification and designation on carbon based films as diamond-like carbon (DLC) films -Advanced measurement technology to support the standardization, and industrial application aimed at the world market-

[14p-A23-3] Optical Characterization of DLC Films by Spectroscopic Ellipsometry

〇Yoko Wasai¹, Masayuki Sakurai¹, Takumi Moriyama¹, Nataliya Nabatova-Gabain¹ (1.HORIBA, Ltd.)

Keywords:Spectroscopic Ellipsometry, Optical characterization, DLC

Lately, Diamond Like Carbon (DLC) films, also called as amorphous carbon, became widely used in various industry fields, due to their exceptional mechanical properties, such as low friction coefficient, high wear resistance and very wide range of optical, chemical and tribological properties. These properties are significantly attributed to DLC films structure and hydrogen bonds, so it is important to adjust them to specific industry application. Therefore standard classification and designation of carbon based films is strongly required. In this presentation, we introduce basics of ellipsometry, examples for DLC films optical characterization. In addition, usage of Ellipsometry for International Standard classification is suggested.