The 77th JSAP Autumn Meeting, 2016

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Symposium (Oral)

Symposium » Classification and designation on carbon based films as diamond-like carbon (DLC) films -Advanced measurement technology to support the standardization, and industrial application aimed at the world market-

[14p-A23-1~9] Classification and designation on carbon based films as diamond-like carbon (DLC) films -Advanced measurement technology to support the standardization, and industrial application aimed at the world market-

Wed. Sep 14, 2016 1:30 PM - 5:30 PM A23 (201B)

Tsuguyori Ohana(AIST)

5:00 PM - 5:15 PM

[14p-A23-8] Evaluation of chemical resistance on diamond-like carbon and related films

〇Hiroki Akasaka1, Tsuneo Suzuki2, Masayuki Nakano3, Kazuhiro Kanda4, Naoto Ohtake1 (1.Tokyo Inst. of Tech., 2.Nagaoka Univ. of Tech., 3.Tokyo Natl. Col. of Tech., 4.Univ. of Hyogo)

Keywords:DLC

ダイヤモンド状炭素(Diamond-like Carbon: DLC)膜は反応性試薬に対して優れた耐性を示すためマイクロデバイス，飲料や薬品の容器へ内面への保護膜として検討されている. DLC膜の炭素のsp3/ sp2結合比及び水素含有量は膜により異なり，これら構造が変化すると膜の特性も変化する.本研究は構造の異なる複数のDLC膜に対して硝酸に対する耐薬品性能を評価し，膜の構造との関係を比較した.