The 77th JSAP Autumn Meeting, 2016

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Symposium (Oral)

Symposium » Classification and designation on carbon based films as diamond-like carbon (DLC) films -Advanced measurement technology to support the standardization, and industrial application aimed at the world market-

[14p-A23-1~9] Classification and designation on carbon based films as diamond-like carbon (DLC) films -Advanced measurement technology to support the standardization, and industrial application aimed at the world market-

Wed. Sep 14, 2016 1:30 PM - 5:30 PM A23 (201B)

Tsuguyori Ohana(AIST)

4:45 PM - 5:00 PM

[14p-A23-7] Hydrogen analysis of DLC thin films by RBS/ERDA with electrostatic accelerator

〇Tsuneo Suzuki1, Akio Shida2, Kazuo Katagiri2, Ayaka Kubo1, Hiroyuki Iso3 (1.Nuclear System Safety Eng., Nagaoka Univ. Tech., 2.EDI, Nagaoka Univ. Tech., 3.NIRS)

Keywords:Hydrogen analysis, DLC, RBS/ERDA

Since hydrogen content of DLC thin films have a great influence on its characteristics, hydrogen quantification is one of the important evaluations. In general, hydrogen content of DLC thin films is about 1-50%. In order to measure amount of hydrogen in DLC thin films with a high degree of accuracy, RBS/ERDA has been used. In this presentation, we introduce the measurement method of hydrogen by RBS/ERDA.