The 77th JSAP Autumn Meeting, 2016

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Symposium (Oral)

Symposium » Trend of Functional Atomic Thin Film Research-Thin Film Growth-

[14p-A33-1~15] Trend of Functional Atomic Thin Film Research-Thin Film Growth-

Wed. Sep 14, 2016 1:15 PM - 6:15 PM A33 (301A)

Atsushi Ando(AIST), Hirokazu Fukidome(Tohoku Univ.)

4:15 PM - 4:30 PM

[14p-A33-10] Effect of Postdeposition Sulfurization Annealing on Sputtering Deposited MoS2 film using Organic Sulfur Compound

〇Seiya Ishihara1,4, Yusuke Hibino1, Naomi Sawamoto1, Takumi Ohashi2, Kentarou Matsuura2, Hideaki Machida3, Masato Ishikawa3, Hiroshi Sudoh3, Hitoshi Wakabayashi2, Atsushi Ogura1 (1.Meiji Univ., 2.Tokyo Tech, 3.Gas-phase Growth Ltd., 4.JSPS Research Fellow)

Keywords:Molybdenum disulfide