The 77th JSAP Autumn Meeting, 2016

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Symposium (Oral)

Symposium » Trend of Functional Atomic Thin Film Research-Thin Film Growth-

[14p-A33-1~15] Trend of Functional Atomic Thin Film Research-Thin Film Growth-

Wed. Sep 14, 2016 1:15 PM - 6:15 PM A33 (301A)

Atsushi Ando(AIST), Hirokazu Fukidome(Tohoku Univ.)

4:30 PM - 4:45 PM

△ [14p-A33-11] Fabrication of MoS2 thin film using (t-C4H9)2S2 and sulfurization condition dependence on S/Mo ratio

〇SEIYA ISHIHARA1,4, YUSUKE HIBINO1, NAOMI SAWAMOTO1, TAKUMI OHASHI2, KENTAROU MATSUURA2, HIDEAKI MACHIDA3, MASATO ISHIKAWA3, HIROSHI SUDOH3, HITOSHI WAKABAYASHI2, ATSUSHI OGURA1 (1.Meiji Univ., 2.Tokyo Tech, 3.Gas-phase Growth Ltd., 4.JSPS Research Fellow)

Keywords:Molybdenum disulfide