[14p-A33-1~15] Trend of Functional Atomic Thin Film Research-Thin Film Growth-

△ [14p-A33-4] Synthesis of Mo_xNb_1-xS₂ thin films by chemical vapor deposition

〇Sho Watanabe¹, Fumiya Uehara², Takashi Yanase³, Taro Nagahama³, Toshihiro Shimada³ (1.Graduate School of Chemical Sciences and Engineering, Hokkaido University, 2.Faculty of Engineering, Hokkaido University, 3.Graduate School of Engineering, Hokkaido University)

Keywords:transition metal chalcogenides, chemical vapor deposition, thin films