The 77th JSAP Autumn Meeting, 2016

Presentation information

Print

Symposium (Oral)

Symposium » IoT/IoE Device Technologies for AI/Deep-Learning era

[14p-B1-1~6] IoT/IoE Device Technologies for AI/Deep-Learning era

Wed. Sep 14, 2016 1:45 PM - 4:15 PM B1 (Exhibition Hall)

Hitoshi Wakabayashi(Titech), Satoshi Inaba(TOSHIBA)

3:45 PM - 4:00 PM

[14p-B1-5] Template removal of low–k films in supercritical CO2 fluid

〇(M1C)Koki Segawa1, Eiichi Kondoh1, Mitsuhiro Watanabe1, Mikhail R. Baklanov2, Liping Zhang2 (1.Yamanashi Univ., 2.IMEC)

Keywords:semiconductor, low-k films