[14p-B11-1~13] 12.4 有機EL・トランジスタ

▼ [14p-B11-5] Fully-Printed Organic Thin-Film Transistors with 1-micron resolution

〇Xuying Liu¹、Chuan Liu²、Masayuki Kanehara³、Kenji Sakamoto¹、Takeshi Yasuda¹、Jun Takeya⁴、Takeo Minari¹ (1.NIMS、2.Sun Yat-sen Univ.、3.Colloidal Ink、4.Tokyo Univ.)

キーワード：printed electronics, organic thin-film transistor, short channel

Fully printed electronics on plastic have attracted considerable interest owing to their high compatibility and ease of integration. Here, we developed an ultra-high-resolution printing technique based on parallel vacuum ultraviolet (PVUV) patterning that can produce high-contrast wettability regions on flexible substrates. We used this technique to selectively deposit a functional ink with a 1-micron feature size, thereby allowing the large-scale fabrication of organic thin-film transistors (OTFTs) with channels as short as 1 μm under ambient atmosphere. Moreover, in short-channel devices, hole injection barriers can be tuned through printing the optimum gate overlaps associated with selectively doping semiconductor/electrode interfaces, resulting in a marked reduction in contact resistance from 20 to 1.5 kohm cm, and an elevation of charge carrier mobility to a record high of 0.3 cm² V^-1 s^-1 in a 1-micron-channel device. The results indicate that this technique is promising for the fabrication of large-area, high-resolution, low-cost electronics.