Determination of crystal orientation dependence of the sputtering yield using polycrystalline metals (1)

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

Wed. Sep 14, 2016 1:45 PM - 5:15 PM B6 (Exhibition Hall)

Yasuhito Gotoh(Kyoto Univ.), Satoshi Ninomiya(Yamanashi Univ.)

2:15 PM - 2:30 PM

〇(M1)Hiroharu Hirai¹, Takanori Nagasaki¹, Masahito Yoshino¹, Tomoaki Yamada¹ (1.Nagoya Univ.)

Keywords:sputtering yield, crystal orientation, EBSD