The 77th JSAP Autumn Meeting, 2016

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Symposium (Oral)

Symposium » Crystallization of IV element Semiconductor thin-film and Deffects control

[14p-B7-1~17] Crystallization of IV element Semiconductor thin-film and Deffects control

Wed. Sep 14, 2016 12:30 PM - 7:15 PM B7 (Exhibition Hall)

Naoto Matsuo(Univ. of Hyogo), Seiichiro Higashi(Hiroshima Univ.), Noritaka Usami(Nagoya Univ.), Ichiro Yonenaga(Tohoku Univ.)

6:00 PM - 6:15 PM

[14p-B7-14] Location dependency of a-Ge film by Flash lamp annealing crystallization.

〇Naoki Yoshioka1, Akira Heya1, Naoto Matsuo1, Yousuke Nakamura2, Gakuhiko Yokomori2, Masaki Yoshioka2 (1.Univ. of Hyogo, 2.USHIO INC.)

Keywords:germanium, crystallization, flash lamp annaling