[14p-B7-1~17] Crystallization of IV element Semiconductor thin-film and Deffects control

[14p-B7-13] Low-Temperature Solid-Phase Crystallization of a-Si, a-Ge Thin Films and Defect Formation During Its Process

〇Naoto Matsuo¹ (1.University of Hyogo)

Keywords:Group 4 Semiconductor, Solid Phase Crystallization, Crystal Defect

The relationship between the hydrogen atoms in the Si film and the defect formation during the excimer laser annealing, that between the photon energy of the soft x-ray and the defect formation during the soft x-ray crystallization, and that between the liquid-phase crystallization or solid-phase crystallization of the FLA crystallization and the point defect are introduced.