[14p-P10-1~25] Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）

[14p-P10-16] Influence of post-annealing atmosphere and temperature on amorphous Cd-Ga-O thin films

〇Chiyuki Sato¹, Yota Kimura¹, Hiroshi Yanagi¹ (1.Univ. of Yamanashi)

Keywords:Amorphous oside semiconductor, Thin film, Post-annealing