The 77th JSAP Autumn Meeting, 2016

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Poster presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）

[14p-P10-1~25] Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P10 (Exhibition Hall)

1:30 PM - 3:30 PM

[14p-P10-25] Resist-free patterning of nanoparticle mist deposition(NMD) method .

〇Yasutaka Nishi1, Makoto Nakazumi1, Koichiro Iwahori1, Kei Nara1 (1.Nikon)

Keywords:TCO, mist deposition method