[14p-P11-1~6] 1.1 Interdisciplinary and General Physics

[14p-P11-3] AFM observaton of DUV irradiation damage on ta-C film

〇TOMOMI KOZU^1,3, Yamaguchi Makoto¹, Kawaguchi Masahiro², Yoshimura Masamichi⁴ (1.Akita Univ, 2.TIRI, 3.InoCo co., 4.TTI)

Keywords:diamond like carbon, deep ultraviolet, Raman spectroscopy

Tetrahedral amorphous Carbon (ta-C) is kind of amorphuos carbo which is include sp³ bond and Hydrogen free. For evaluation of ta-C, deep ultraviolete DUV) Raman spectroscopy is usefull but irradiation of DUV makes damage on ta-C film. We have investigated DUV irradiation damege on ta-C film. This time we observe the damage by using atomic force microscope.