TOMOMI KOZU

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 4:00 PM - 6:00 PM P11 (Exhibition Hall)

Poster presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.1 Interdisciplinary and General Physics

[14p-P11-1~6] 1.1 Interdisciplinary and General Physics

4:00 PM - 6:00 PM

[14p-P11-3] AFM observaton of DUV irradiation damage on ta-C film

〇TOMOMI KOZU^1,3, Yamaguchi Makoto¹, Kawaguchi Masahiro², Yoshimura Masamichi⁴ (1.Akita Univ, 2.TIRI, 3.InoCo co., 4.TTI)