The 77th JSAP Autumn Meeting, 2016

Presentation information

Print

Poster presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[14p-P15-1~2] 7.2 Applications and technologies of electron beams

Wed. Sep 14, 2016 4:00 PM - 6:00 PM P15 (Exhibition Hall)

4:00 PM - 6:00 PM

[14p-P15-2] Simulation of Surface Potential and Charge Accumulation under Electron Beam Irradiation

〇(M2)AKIHIRO FUKUZAWA1, MASATOSHI KOTERA1 (1.Osaka Institute of Technology)

Keywords:charging, electron beam, simulation