[14p-P16-1~8] 7.3 Micro/Nano patterning and fabrication

[14p-P16-1] Control of upward growth on the three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

〇Mizue Sekine¹, Etsuo Maeda¹, Reo Kometani¹ (1.The Univ. of Tokyo)

Keywords:focused-ion-beam, 3-D nanostructure

Focused-ion-beam chemical vapor deposition has great advantages in 3-D nanostructure fabrication. However, because of growth rate difference on the vertical direction, it was difficult to fabricate 3-D nanostructures properly to 3-D CAD model. In this study, we developed precise 3-D CAM system with the collection function of dwell time to uniform upward growth of deposition. To evaluate our system, nanosprings were fabricated without and with the correction. The standard deviation of the pitch was reduced from 82.1 nm to 45.5 nm. We demonstrated that the presented system has the potential to fabricate 3-D functional devices more precisely than the conventional means.