[14p-P20-1~4] 13.7 Nano structures and quantum phenomena

[14p-P20-3] The effect of electroluminescence of GaAs Quantum Nanodisk LED by Combination of Bio-template and Neutral Beam Etching

〇Akio Higo¹, Takayuki Kiba², Cedric Thomas³, Junichi Takayama⁴, Hassanet Sodabanlu⁵, Naofumi Okamoto⁶, Ichiro Yamashita⁶, Masakazu Sugiyama⁵, Yoshiaki Nakano⁵, Akihiro Murayama⁴, Seiji Samukawa^1,3 (1.WPI-AIMR, Tohoku Univ., 2.Kitami Institute of Tech., 3.IFS, Tohoku Univ., 4.IST, Hokkaido Univ., 5.Sch.of Eng., the Univ. of Tokyo, 6.NAIST)

Keywords:quantum nanodisk, GaAs

We have developed a bio-template and neutral beam etching for III-V compound semiconductor optical devices with Fe core inside ferritin protain shells.Diameter and thickness of quantum nanodisk can be controlled indendently for tuning quantum energy levels. GaAs nanodisk-LEDs have been successfully operated at room temperature with 12nm in dimater GaAs nanodisk.